Crystal defect analysis in AIN layers grown by MOVPE on bulk AIN

A. Mogilatenko, A. Knauer, U. Zeimer, C. Netzel, J. Jeschke, R.-S. Unger, C. Hartmann, J. Wollweber, A. Dittmar, U. Juda, M. Weyers, M. Bickermann, Journal of Crystal Growth, Volume 505, 69 - 73 (2019), DOI: 10.1016/j.jcrysgro.2018.10.021.